MEMS and Microsystem Technologies:
- MEMS, micromachined sensors/actuators and their system integration
- Traditional and nontraditional microfabrication and micromachining technologies
- Packaging for microsensors, microactuators, and microsystems
- Analog and digital electronic interface for MEMS devices; embedded systems
- Power sources for microsystems, microbatteries
Application Areas of Interest for Autonomous Microsystems:
- Biomedical devices
- Environmental monitoring
- Sensors for Internet of Things (IoT) and Cyber-Physical Systems (CPS)