发个MEMS的链接，希望对大家有用~

MEMS work in different universities


MEMS @ MIT
http://www-mtl.mit.edu/mtlhome/mems/index.shtml

UC Berkeley
http://www-bsac.eecs.berkeley.edu/

Stanford Micro fluidic Lab
http://microfluidics.stanford.edu/links.htm

MEMS @ Stanford
http://snf.stanford.edu/
http://transducers.stanford.edu/
http://micromachine.stanford.edu/smssl/

Goergia Tech
http://mems.mirc.gatech.edu/

Caltech Micro-machining group
http://touch.caltech.edu/

Purdue university center for Nano Engineering
http://www.nanodevices.ecn.purdue.edu/

University of Austin texas
http://weewave.mer.utexas.edu/


Case western reserve MEMS lab
http://mems.cwru.edu/


MEMS @ UCLA
http://www.icsl.ucla.edu/~mems/
Micro fluidics @ UCLA
http://ho.seas.ucla.edu/

MEMS @ University of Colorado, boulder
http://mems.colorado.edu/

MEMS @ University of Michigan
Khalil najafi group
http://www.eecs.umich.edu/najafi/
Kendell Wise group
http://www.eecs.umich.edu/~wise/
Masterangelo group
http://www.eecs.umich.edu/~carlosm/

MEMS @ University of Minnesota
http://www.ee.umn.edu/groups/mems/

MEMS @ North easten university
http://www.ece.neu.edu/groups/mfl/